Tender

Supply and Commissioning of an Inductively Coupled Plasma Etcher

  • University of Strathclyde

F02: Contract notice

Notice identifier: 2025/S 000-031668

Procurement identifier (OCID): ocds-h6vhtk-04eb72

Published 11 June 2025, 4:49pm



Section one: Contracting authority

one.1) Name and addresses

University of Strathclyde

Learning & Teaching Building, 49 Richmond Street

Glasgow

G1 1XU

Contact

Natasha Murray

Email

natasha.murray@strath.ac.uk

Country

United Kingdom

NUTS code

UKM82 - Glasgow City

Internet address(es)

Main address

http://www.strath.ac.uk/

Buyer's address

https://www.publiccontractsscotland.gov.uk/search/Search_AuthProfile.aspx?ID=AA00113

one.2) Information about joint procurement

The contract is awarded by a central purchasing body

one.3) Communication

The procurement documents are available for unrestricted and full direct access, free of charge, at

https://www.publictendersscotland.publiccontractsscotland.gov.uk/esop/pts-host/public/pts/web/login.html

Additional information can be obtained from the above-mentioned address

Tenders or requests to participate must be submitted electronically via

https://www.publictendersscotland.publiccontractsscotland.gov.uk/esop/pts-host/public/pts/web/login.html

Electronic communication requires the use of tools and devices that are not generally available. Unrestricted and full direct access to these tools and devices is possible, free of charge, at

https://www.publictendersscotland.publiccontractsscotland.gov.uk/esop/pts-host/public/pts/web/login.html

one.4) Type of the contracting authority

Body governed by public law

one.5) Main activity

Education


Section two: Object

two.1) Scope of the procurement

two.1.1) Title

Supply and Commissioning of an Inductively Coupled Plasma Etcher

Reference number

UOS-36338-2025

two.1.2) Main CPV code

  • 38000000 - Laboratory, optical and precision equipments (excl. glasses)

two.1.3) Type of contract

Supplies

two.1.4) Short description

This Notice relates to an open tender above the Agreement on Government Procurement (GPA) threshold for goods related to research and development equipment required by the University of Strathclyde's (Contracting Authority) Institute of Photonics department. The Contracting Authority envisions a single supplier shall undertake the contract for the supply, delivery, installation and commissioning of an Inductively Coupled Plasma Etcher system at a University of Strathclyde Lab facility, located in the Technology and Innovation Centre (TIC) specified cleanroom.

The equipment is grant funded by the Wolfson Foundation to advance scientific investigation in neuro-technology.

two.1.5) Estimated total value

Value excluding VAT: £425,827

two.1.6) Information about lots

This contract is divided into lots: No

two.2) Description

two.2.2) Additional CPV code(s)

  • 31712100 - Microelectronic machinery and apparatus

two.2.3) Place of performance

NUTS codes
  • UKM82 - Glasgow City
Main site or place of performance

University of Strathclyde

two.2.4) Description of the procurement

The Institute of Photonics is seeking to complement their cleanroom micro-fabrication facility equipment with an Inductively Coupled Plasma Etcher system

The Technical Team envision that the equipment will process semiconductor materials that will include but not be limited to:

1 Gallium Nitride (GaN) light-emitting diodes

2 Silicon (Si) passive and active devices

The equipment will be used to advance scientific investigation in neuro-technology and operated by PhD students, Postdoctoral Research Associates and Technicians within the Institute of Photonics.

The Contracting Authority anticipates that the contract will be for a duration of twenty (24) months. The Contracting Authority requires a supplier that can fulfil the below non-exhaustive list of requirements:

1 Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) mode of operation to plasma etch hard materials such as GaN at etch rate of >500nm/min

2 Deep Silicon Etching (DSE) mode of operation to plasma etch high aspect ratio and high-density structures in Silicon at etch rate of >1000nm/min

3 These two modes of operation co-existing within the same equipment within a minimal footprint

4 Low-maintenance, especially with the provision of servicing-free high vacuum pumping systems (magnetic-levitated turbo molecular pump)

Please refer to the full technical and tender information available in the Public Contracts Scotland-Tender.

two.2.5) Award criteria

Quality criterion - Name: Quality / Weighting: 50

Price - Weighting: 50

two.2.6) Estimated value

Value excluding VAT: £425,827

two.2.7) Duration of the contract, framework agreement or dynamic purchasing system

Duration in months

24

This contract is subject to renewal

No

two.2.10) Information about variants

Variants will be accepted: No

two.2.11) Information about options

Options: Yes

Description of options

The Contracting Authority reserves the right to request additional deliveries by the successful Tenderer, either intended as partial replacement of supplies or installations or as extensions of existing supplies and installations.

The Contracting Authority may at it's sole discretion exercise this option.

two.2.13) Information about European Union Funds

The procurement is related to a project and/or programme financed by European Union funds: No


Section three. Legal, economic, financial and technical information

three.1) Conditions for participation

three.1.2) Economic and financial standing

List and brief description of selection criteria

4B.1.2 Turnover

Bidders will be required to have an average yearly turnover of a minimum of 850,000.00 GBP for the last 3 years.

4B.5.1a - 4B.5.3 Insurances

It is a requirement of this contract that bidders hold, or can commit to obtain prior to the commencement of any subsequently awarded contract, the types and levels of insurance indicated below:

Employer’s (Compulsory) Liability Insurance = 10m GBP

Public and Product Liability Insurance = 10m GBP

Professional Indemnity Insurance = NOT USED

In respect of any one incident and unlimited as to number of claims, and adequate insurances covering all the Contractor's other liabilities in terms of the Contract

three.1.3) Technical and professional ability

List and brief description of selection criteria

4C.1.2 Previous Experience Minimum level(s) of standards required:

Bidders will be required to provide three (3) examples that demonstrate that they have the relevant experience to deliver the equipment as stated in the Contract Notice.


Section four. Procedure

four.1) Description

four.1.1) Type of procedure

Open procedure

four.1.8) Information about the Government Procurement Agreement (GPA)

The procurement is covered by the Government Procurement Agreement: Yes

four.2) Administrative information

four.2.1) Previous publication concerning this procedure

Notice number: 2025/S 000-008704

four.2.2) Time limit for receipt of tenders or requests to participate

Date

14 July 2025

Local time

12:00pm

four.2.4) Languages in which tenders or requests to participate may be submitted

English

four.2.6) Minimum time frame during which the tenderer must maintain the tender

Duration in months: 4 (from the date stated for receipt of tender)

four.2.7) Conditions for opening of tenders

Date

14 July 2025

Local time

12:00pm


Section six. Complementary information

six.1) Information about recurrence

This is a recurrent procurement: No

six.2) Information about electronic workflows

Electronic ordering will be used

Electronic invoicing will be accepted

Electronic payment will be used

six.3) Additional information

The buyer is using PCS-Tender to conduct this ITT exercise. The Project code is 29124. For more information see: http://www.publiccontractsscotland.gov.uk/info/InfoCentre.aspx?ID=2343

Community benefits are included in this requirement. For more information see: https://www.gov.scot/policies/public-sector-procurement/community-benefits-in-procurement/

A summary of the expected community benefits has been provided as follows:

Voluntary Community benefits are included in this requirement. For more information see:

https://www.gov.scot/policies/public-sector-procurement/community-benefits-in-procurement/

The Contracting Authority acknowledges that is procurement activities have a significant impact on the environment, society and the economy. The Contracting Authority recognises that Community Benefits are a key component in maximising social, economic and environmental benefits. The achievements and delivery of Community Benefits can contribute to the University of Strathclyde's strategic Plan 2030. The Contracting Authority proposes to use a Voluntary Approach to Community Benefits for this requirement; This approach is to encourage the Tenderer to offer Community Benefits post Tender Submission. These offered Community Benefits will not form part of the contractual obligation and will not form part of the consideration at Tender evaluation stage.

(SC Ref:800205)

six.4) Procedures for review

six.4.1) Review body

Glasgow Sheriff Court

1 Carlton Place

Glasgow

G5 9DA

Country

United Kingdom