Section one: Contracting authority
one.1) Name and addresses
University of Strathclyde
Learning & Teaching Building, 49 Richmond Street
Glasgow
G1 1XU
Contact
Natasha Murray
Country
United Kingdom
NUTS code
UKM82 - Glasgow City
Internet address(es)
Main address
Buyer's address
https://www.publiccontractsscotland.gov.uk/search/Search_AuthProfile.aspx?ID=AA00113
one.2) Information about joint procurement
The contract is awarded by a central purchasing body
one.4) Type of the contracting authority
Body governed by public law
one.5) Main activity
Education
Section two: Object
two.1) Scope of the procurement
two.1.1) Title
Supply and Commissioning of an Inductively Coupled Plasma Etcher
Reference number
UOS-36338-2025
two.1.2) Main CPV code
- 38000000 - Laboratory, optical and precision equipments (excl. glasses)
two.1.3) Type of contract
Supplies
two.1.4) Short description
This Notice relates to an open tender above the Agreement on Government Procurement (GPA) threshold for goods related to research and development equipment required by the University of Strathclyde's (Contracting Authority) Institute of Photonics department. The Contracting Authority envisions a single supplier shall undertake the contract for the supply, delivery, installation and commissioning of an Inductively Coupled Plasma Etcher system at a University of Strathclyde Lab facility, located in the Technology and Innovation Centre (TIC) specified cleanroom.
The equipment is grant funded by the Wolfson Foundation to advance scientific investigation in neuro-technology.
two.1.6) Information about lots
This contract is divided into lots: No
two.1.7) Total value of the procurement (excluding VAT)
Value excluding VAT: £375,883.47
two.2) Description
two.2.2) Additional CPV code(s)
- 31712100 - Microelectronic machinery and apparatus
two.2.3) Place of performance
NUTS codes
- UKM82 - Glasgow City
Main site or place of performance
University of Strathclyde
two.2.4) Description of the procurement
The Institute of Photonics is seeking to complement their cleanroom micro-fabrication facility equipment with an Inductively Coupled Plasma Etcher system
The Technical Team envision that the equipment will process semiconductor materials that will include but not be limited to:
1 Gallium Nitride (GaN) light-emitting diodes
2 Silicon (Si) passive and active devices
The equipment will be used to advance scientific investigation in neuro-technology and operated by PhD students, Postdoctoral Research Associates and Technicians within the Institute of Photonics.
The Contracting Authority anticipates that the contract will be for a duration of twenty (24) months. The Contracting Authority requires a supplier that can fulfil the below non-exhaustive list of requirements:
1 Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) mode of operation to plasma etch hard materials such as GaN at etch rate of >500nm/min
2 Deep Silicon Etching (DSE) mode of operation to plasma etch high aspect ratio and high-density structures in Silicon at etch rate of >1000nm/min
3 These two modes of operation co-existing within the same equipment within a minimal footprint
4 Low-maintenance, especially with the provision of servicing-free high vacuum pumping systems (magnetic-levitated turbo molecular pump)
Please refer to the full technical and tender information available in the Public Contracts Scotland-Tender.
two.2.5) Award criteria
Quality criterion - Name: Quality / Weighting: 50
Price - Weighting: 50
two.2.11) Information about options
Options: Yes
Description of options
The Contracting Authority reserves the right to request additional deliveries by the successful Tenderer, either intended as partial replacement of supplies or installations or as extensions of existing supplies and installations.
The Contracting Authority may at it's sole discretion exercise this option.
two.2.13) Information about European Union Funds
The procurement is related to a project and/or programme financed by European Union funds: No
Section four. Procedure
four.1) Description
four.1.1) Type of procedure
Open procedure
four.1.8) Information about the Government Procurement Agreement (GPA)
The procurement is covered by the Government Procurement Agreement: Yes
four.2) Administrative information
four.2.1) Previous publication concerning this procedure
Notice number: 2025/S 000-031668
Section five. Award of contract
Contract No
UOS-36338-2025
A contract/lot is awarded: Yes
five.2) Award of contract
five.2.1) Date of conclusion of the contract
16 December 2025
five.2.2) Information about tenders
Number of tenders received: 4
Number of tenders received from SMEs: 3
Number of tenders received from tenderers from other EU Member States: 2
Number of tenders received from tenderers from non-EU Member States: 2
Number of tenders received by electronic means: 4
The contract has been awarded to a group of economic operators: No
five.2.3) Name and address of the contractor
SENTECH Instruments GmbH
Schwarzschildstrasse 2
Berlin
12489
Country
Germany
NUTS code
- DE3 - Berlin
The contractor is an SME
Yes
five.2.4) Information on value of contract/lot (excluding VAT)
Total value of the contract/lot: £375,883.47
Section six. Complementary information
six.3) Additional information
(SC Ref:819987)
six.4) Procedures for review
six.4.1) Review body
Glasgow Sheriff Court
1 Carlton Place
Glasgow
G5 9DA
Country
United Kingdom