Contract

Supply of a Plasma Etch Tool for Silicon Carbide (SiC) Etching

  • Swansea University

F03: Contract award notice

Notice identifier: 2021/S 000-014061

Procurement identifier (OCID): ocds-h6vhtk-029388

Published 21 June 2021, 3:15pm



Section one: Contracting authority

one.1) Name and addresses

Swansea University

Procurement - VC's Office, Swansea University, Singleton Park

Swansea

SA2 8PP

Email

procurement@swansea.ac.uk

Telephone

+44 1792602779

Country

United Kingdom

NUTS code

UKL18 - Swansea

Internet address(es)

Main address

www.swansea.ac.uk

Buyer's address

https://www.sell2wales.gov.wales/search/Search_AuthProfile.aspx?ID=AA0345

one.2) Information about joint procurement

The contract is awarded by a central purchasing body

one.4) Type of the contracting authority

Body governed by public law

one.5) Main activity

Education


Section two: Object

two.1) Scope of the procurement

two.1.1) Title

Supply of a Plasma Etch Tool for Silicon Carbide (SiC) Etching

Reference number

SU111(21)

two.1.2) Main CPV code

  • 38000000 - Laboratory, optical and precision equipments (excl. glasses)

two.1.3) Type of contract

Supplies

two.1.4) Short description

This Tender Specification is for the supply and delivery of a Plasma Etch Tool for SiC etching. In procuring this system, the University is seeking to augment its well-established existing plasma etch and deposition tool set, expanding the capabilities that the CISM will be able to provide.

The new tool will be of strategic importance in delivering both frontside SiC etch capability for power MOSFET trench applications, and backside SiC via etch capability for GaN-on-SiC device applications. Reliability of the equipment is therefore paramount to maintaining, supporting and complimenting the wide array of experimental work that will be conducted within the facility.

two.1.6) Information about lots

This contract is divided into lots: No

two.1.7) Total value of the procurement (excluding VAT)

Lowest offer: £644,000 / Highest offer: £723,000 taken into consideration

two.2) Description

two.2.2) Additional CPV code(s)

  • 38900000 - Miscellaneous evaluation or testing instruments
  • 38970000 - Research, testing and scientific technical simulator
  • 39180000 - Laboratory furniture

two.2.3) Place of performance

NUTS codes
  • UKL - Wales
Main site or place of performance

to be delivered to Newport Wafer Fab

two.2.4) Description of the procurement

This Tender Specification is for the supply and delivery of a Plasma Etch Tool for SiC etching. In procuring this system, the University is seeking to augment its well-established existing plasma etch and deposition tool set, expanding the capabilities that the CISM will be able to provide.

The new tool will be of strategic importance in delivering both frontside SiC etch capability for power MOSFET trench applications, and backside SiC via etch capability for GaN-on-SiC device applications. Reliability of the equipment is therefore paramount to maintaining, supporting and complimenting the wide array of experimental work that will be conducted within the facility.

two.2.5) Award criteria

Quality criterion - Name: Technical / Weighting: 45

Quality criterion - Name: After Sales Support & Warranty / Weighting: 15

Quality criterion - Name: Lead Time / Weighting: 10

Price - Weighting: 30

two.2.11) Information about options

Options: No

two.2.13) Information about European Union Funds

The procurement is related to a project and/or programme financed by European Union funds: No

two.2.14) Additional information

Funding for this procurement has been secured from the Driving the Electric Revolution (DER) Industrialisation Centres Programme via Innovate UK.


Section four. Procedure

four.1) Description

four.1.1) Type of procedure

Open procedure

four.1.8) Information about the Government Procurement Agreement (GPA)

The procurement is covered by the Government Procurement Agreement: Yes

four.2) Administrative information

four.2.1) Previous publication concerning this procedure

Notice number: 2021/S 000-003105


Section five. Award of contract

Contract No

SU111(21)

A contract/lot is awarded: Yes

five.2) Award of contract

five.2.1) Date of conclusion of the contract

17 May 2021

five.2.2) Information about tenders

Number of tenders received: 2

Number of tenders received from SMEs: 0

Number of tenders received from tenderers from other EU Member States: 2

Number of tenders received from tenderers from non-EU Member States: 0

Number of tenders received by electronic means: 2

The contract has been awarded to a group of economic operators: No

five.2.3) Name and address of the contractor

SPTS Technologies

Ringland Way

Newport

NP18 2TA

Country

United Kingdom

NUTS code
  • UKL21 - Monmouthshire and Newport
The contractor is an SME

Yes

five.2.4) Information on value of contract/lot (excluding VAT)

Lowest offer: £644,000 / Highest offer: £723,000 taken into consideration


Section six. Complementary information

six.3) Additional information

(WA Ref:111656)

six.4) Procedures for review

six.4.1) Review body

High Court

Royal Courts of Justice, The Strand

London

WC2A 2LL

Telephone

+44 2079477501

Country

United Kingdom