Tender

Supply of a Plasma Etch Tool for Silicon Carbide (SiC) Etching

  • Swansea University

F02: Contract notice

Notice identifier: 2021/S 000-003105

Procurement identifier (OCID): ocds-h6vhtk-029388

Published 16 February 2021, 12:48pm



Section one: Contracting authority

one.1) Name and addresses

Swansea University

Procurement - VC's Office, Swansea University, Singleton Park

Swansea

SA2 8PP

Email

procurement@swansea.ac.uk

Telephone

+44 1792602779

Country

United Kingdom

NUTS code

UKL18 - Swansea

Internet address(es)

Main address

www.swansea.ac.uk

Buyer's address

https://www.sell2wales.gov.wales/search/Search_AuthProfile.aspx?ID=AA0345

one.2) Information about joint procurement

The contract is awarded by a central purchasing body

one.3) Communication

The procurement documents are available for unrestricted and full direct access, free of charge, at

https://etenderwales.bravosolution.co.uk/

Additional information can be obtained from the above-mentioned address

Tenders or requests to participate must be submitted electronically via

https://etenderwales.bravosolution.co.uk/

Electronic communication requires the use of tools and devices that are not generally available. Unrestricted and full direct access to these tools and devices is possible, free of charge, at

https://etenderwales.bravosolution.co.uk/

one.4) Type of the contracting authority

Body governed by public law

one.5) Main activity

Education


Section two: Object

two.1) Scope of the procurement

two.1.1) Title

Supply of a Plasma Etch Tool for Silicon Carbide (SiC) Etching

Reference number

SU111(21)

two.1.2) Main CPV code

  • 38000000 - Laboratory, optical and precision equipments (excl. glasses)

two.1.3) Type of contract

Supplies

two.1.4) Short description

This Tender Specification is for the supply and delivery of a Plasma Etch Tool for SiC etching. In procuring this system, the University is seeking to augment its well-established existing plasma etch and deposition tool set, expanding the capabilities that the CISM will be able to provide.

The new tool will be of strategic importance in delivering both frontside SiC etch capability for power MOSFET trench applications, and backside SiC via etch capability for GaN-on-SiC device applications. Reliability of the equipment is therefore paramount to maintaining, supporting and complimenting the wide array of experimental work that will be conducted within the facility.

two.1.5) Estimated total value

Value excluding VAT: £1,000,000

two.1.6) Information about lots

This contract is divided into lots: No

two.2) Description

two.2.2) Additional CPV code(s)

  • 38900000 - Miscellaneous evaluation or testing instruments
  • 38970000 - Research, testing and scientific technical simulator
  • 39180000 - Laboratory furniture

two.2.3) Place of performance

NUTS codes
  • UKL - WALES
Main site or place of performance

to be delivered to Newport Wafer Fab

two.2.4) Description of the procurement

This Tender Specification is for the supply and delivery of a Plasma Etch Tool for SiC etching. In procuring this system, the University is seeking to augment its well-established existing plasma etch and deposition tool set, expanding the capabilities that the CISM will be able to provide.

The new tool will be of strategic importance in delivering both frontside SiC etch capability for power MOSFET trench applications, and backside SiC via etch capability for GaN-on-SiC device applications. Reliability of the equipment is therefore paramount to maintaining, supporting and complimenting the wide array of experimental work that will be conducted within the facility.

two.2.5) Award criteria

Price is not the only award criterion and all criteria are stated only in the procurement documents

two.2.6) Estimated value

Value excluding VAT: £1,000,000

two.2.7) Duration of the contract, framework agreement or dynamic purchasing system

Duration in months

36

This contract is subject to renewal

No

two.2.10) Information about variants

Variants will be accepted: No

two.2.11) Information about options

Options: No

two.2.13) Information about European Union Funds

The procurement is related to a project and/or programme financed by European Union funds: No

two.2.14) Additional information

Funding for this procurement has been secured from the Driving the Electric Revolution (DER) Industrialisation Centres Programme via Innovate UK.


Section three. Legal, economic, financial and technical information

three.1) Conditions for participation

three.1.2) Economic and financial standing

Selection criteria as stated in the procurement documents

three.1.3) Technical and professional ability

Selection criteria as stated in the procurement documents


Section four. Procedure

four.1) Description

four.1.1) Type of procedure

Open procedure

four.1.8) Information about the Government Procurement Agreement (GPA)

The procurement is covered by the Government Procurement Agreement: Yes

four.2) Administrative information

four.2.2) Time limit for receipt of tenders or requests to participate

Date

18 March 2021

Local time

12:00pm

four.2.4) Languages in which tenders or requests to participate may be submitted

English, Welsh

four.2.6) Minimum time frame during which the tenderer must maintain the tender

Duration in months: 3 (from the date stated for receipt of tender)

four.2.7) Conditions for opening of tenders

Date

18 March 2021

Local time

12:00pm


Section six. Complementary information

six.1) Information about recurrence

This is a recurrent procurement: No

six.3) Additional information

This procurement process is being carried out on eTenderwales. Please note this is a separate website and if you are not already registered,

registration will be required.

To access eTenderwales, express your interest in this notice and access the tender documentation please visit

https://etenderwales.bravosolution.co.uk/web/login.shtml and search for PQQ/ITT code itt_86003 within the appropriate area

NOTE: The authority is using eTenderwales to carry out this procurement process. To obtain further information record your interest on Sell2Wales at https://www.sell2wales.gov.wales/search/search_switch.aspx?ID=108252

(WA Ref:108252)

The buyer considers that this contract is suitable for consortia.

six.4) Procedures for review

six.4.1) Review body

High Court

Royal Courts of Justice, The Strand

London

WC2A 2LL

Telephone

+44 2079477501

Country

United Kingdom