Section one: Contracting authority
one.1) Name and addresses
Queen's University Belfast
University Road
Belfast
BT7 1NN
Contact
Emmett McCann
Country
United Kingdom
NUTS code
UKN06 - Belfast
Internet address(es)
Main address
Buyer's address
https://in-tendhost.co.uk/queensuniversitybelfast/aspx/Home
one.3) Communication
Additional information can be obtained from the above-mentioned address
Tenders or requests to participate must be submitted electronically via
https://in-tendhost.co.uk/queensuniversitybelfast/aspx/Home
Tenders or requests to participate must be submitted to the above-mentioned address
one.4) Type of the contracting authority
Body governed by public law
one.5) Main activity
Education
Section two: Object
two.1) Scope of the procurement
two.1.1) Title
QUB/2306/22 Supply, Delivery, Installation and Commissioning of a Physical Vapour Deposition (PVD) Thin Film Deposition Cluster - Request for Information
Reference number
QUB/2306/22
two.1.2) Main CPV code
- 38000000 - Laboratory, optical and precision equipments (excl. glasses)
two.1.3) Type of contract
Supplies
two.1.4) Short description
Queen’s University Belfast ("Queen’s") seeks to engage with providers of Thin Film Deposition Cluster Tools for the UKRI Smart Nano NI Project activity being delivered by Queen’s. At present we have a technical requirement for an instrument that includes;- 1. A wafer handling system/robot (150mm or 200mm) and load-lock that can provide to a multiple of process chambers (options for single wafer or cassette loading).- 2. A Physical Vapour Deposition (PVD) process module 1 - with up to eight (8) sources capable of coverage of 150 mm wafer with high uniformity.- 3. A PVD process module 2 - with up to six (6) sources capable of coverage of 150 mm wafer with high uniformity.- 4. An Atomic layer Deposition (ALD) module for oxide deposition capable of coverage of 150 mm wafers with high uniformity. - 5. A glove-box / transfer-module for the removal/packaging, under controlled conditions, for 150mm wafers.
two.1.6) Information about lots
This contract is divided into lots: No
two.2) Description
two.2.3) Place of performance
NUTS codes
- UKN06 - Belfast
two.2.4) Description of the procurement
Please refer to the Published RFI Documentation
two.2.13) Information about European Union Funds
The procurement is related to a project and/or programme financed by European Union funds: No
two.3) Estimated date of publication of contract notice
31 October 2022
Section four. Procedure
four.1) Description
four.1.8) Information about the Government Procurement Agreement (GPA)
The procurement is covered by the Government Procurement Agreement: Yes
Section six. Complementary information
six.4) Procedures for review
six.4.1) Review body
Queen's University Belfast
Belfast
Country
United Kingdom
six.4.2) Body responsible for mediation procedures
Queen's University Belfast
Belfast
Country
United Kingdom
six.4.4) Service from which information about the review procedure may be obtained
Queen's University Belfast
Belfast
Country
United Kingdom