Tender

202122/547 Supply of up to four dry etch and deposition systems

  • University of Leeds

F02: Contract notice

Notice identifier: 2022/S 000-004314

Procurement identifier (OCID): ocds-h6vhtk-031776

Published 15 February 2022, 4:14pm



Section one: Contracting authority

one.1) Name and addresses

University of Leeds

University of Leeds, 1 - 3 Lifton Villas, Lifton Place

Leeds

LS2 9JT

Contact

Sam Greaves

Email

s.j.greaves@leeds.ac.uk

Telephone

+44 01133438178

Country

United Kingdom

NUTS code

UKE42 - Leeds

Internet address(es)

Main address

http://www.leeds.ac.uk

one.3) Communication

The procurement documents are available for unrestricted and full direct access, free of charge, at

https://www.delta-esourcing.com/tenders/UK-UK-Leeds:-Dry-etching-equipment./ZA5CH77BT9

Additional information can be obtained from the above-mentioned address

Tenders or requests to participate must be submitted to the above-mentioned address

one.4) Type of the contracting authority

Body governed by public law

one.5) Main activity

Education


Section two: Object

two.1) Scope of the procurement

two.1.1) Title

202122/547 Supply of up to four dry etch and deposition systems

two.1.2) Main CPV code

  • 22520000 - Dry-etching equipment

two.1.3) Type of contract

Supplies

two.1.4) Short description

The University of Leeds is seeking tenders for four dry etch and deposition systems, specifically:

•A Deep-Silicon Reactive Ion Etcher (D-RIE)

•An Inductively Coupled Plasma-RIE (ICP-RIE)

•A parallel plate RIE

•A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)

two.1.5) Estimated total value

Value excluding VAT: £25,000,000

two.1.6) Information about lots

This contract is divided into lots: Yes

Tenders may be submitted for all lots

two.2) Description

two.2.1) Title

Lot No

1

two.2.2) Additional CPV code(s)

  • 22520000 - Dry-etching equipment

two.2.3) Place of performance

NUTS codes
  • UKE42 - Leeds
Main site or place of performance

Leeds

two.2.4) Description of the procurement

The University of Leeds is seeking tenders for four dry etch and deposition systems, specifically:

•A Deep-Silicon Reactive Ion Etcher (D-RIE)

•An Inductively Coupled Plasma-RIE (ICP-RIE)

•A parallel plate RIE

•A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)

two.2.5) Award criteria

Price is not the only award criterion and all criteria are stated only in the procurement documents

two.2.6) Estimated value

Value excluding VAT: £25,000,000

two.2.7) Duration of the contract, framework agreement or dynamic purchasing system

Start date

31 July 2022

End date

31 July 2023

This contract is subject to renewal

No

two.2.9) Information about the limits on the number of candidates to be invited

Envisaged minimum number: 2

two.2.10) Information about variants

Variants will be accepted: No

two.2.11) Information about options

Options: No

two.2.13) Information about European Union Funds

The procurement is related to a project and/or programme financed by European Union funds: No

two.2.14) Additional information

To respond to this opportunity please click here: https://neupc.delta-esourcing.com/respond/ZA5CH77BT9


Section three. Legal, economic, financial and technical information

three.1) Conditions for participation

three.1.2) Economic and financial standing

Selection criteria as stated in the procurement documents

three.1.3) Technical and professional ability

Selection criteria as stated in the procurement documents


Section four. Procedure

four.1) Description

four.1.1) Type of procedure

Competitive procedure with negotiation

four.1.8) Information about the Government Procurement Agreement (GPA)

The procurement is covered by the Government Procurement Agreement: Yes

four.2) Administrative information

four.2.2) Time limit for receipt of tenders or requests to participate

Date

16 March 2022

four.2.4) Languages in which tenders or requests to participate may be submitted

English


Section six. Complementary information

six.1) Information about recurrence

This is a recurrent procurement: No

six.3) Additional information

For more information about this opportunity, please visit the Delta eSourcing portal at:

https://neupc.delta-esourcing.com/tenders/UK-UK-Leeds:-Dry-etching-equipment./ZA5CH77BT9

To respond to this opportunity, please click here:

https://neupc.delta-esourcing.com/respond/ZA5CH77BT9

GO Reference: GO-2022215-PRO-19654546

six.4) Procedures for review

six.4.1) Review body

High Court of England and Wales

The Strand

London

Country

United Kingdom

six.4.2) Body responsible for mediation procedures

University of Leeds

Purchasing Office, 1 - 3 Lifton Villas, Lifton Place

Leeds

LS2 9JZ

Telephone

+44 01133438178

Country

United Kingdom

six.4.4) Service from which information about the review procedure may be obtained

University of Leeds

Purchasing Office, 1 - 3 Lifton Villas, Lifton Place

Leeds

LS2 9JZ

Telephone

+44 01133438178

Country

United Kingdom