Contract

Provision of a 200mm High Performance Electron Beam Lithography System

  • UNIVERSITY OF SOUTHAMPTON

F03: Contract award notice

Notice identifier: 2023/S 000-001468

Procurement identifier (OCID): ocds-h6vhtk-036266

Published 17 January 2023, 5:09pm



Section one: Contracting authority

one.1) Name and addresses

UNIVERSITY OF SOUTHAMPTON

BUILDING 37, HIGHFIELD CAMPUS,UNIVERSITY ROAD

SOUTHAMPTON

SO171BJ

Contact

Kayleigh Luckins

Email

procurement@soton.ac.uk

Telephone

+44 2380595000

Country

United Kingdom

Region code

UKJ32 - Southampton

Justification for not providing organisation identifier

Not on any register

Internet address(es)

Main address

https://www.southampton.ac.uk/

Buyer's address

https://in-tendhost.co.uk/universityofsouthampton/aspx/Home

one.4) Type of the contracting authority

Body governed by public law

one.5) Main activity

Education


Section two: Object

two.1) Scope of the procurement

two.1.1) Title

Provision of a 200mm High Performance Electron Beam Lithography System

Reference number

2021UoS-0345

two.1.2) Main CPV code

  • 38000000 - Laboratory, optical and precision equipments (excl. glasses)

two.1.3) Type of contract

Supplies

two.1.4) Short description

The University is looking to procure a new 200mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service.

two.1.6) Information about lots

This contract is divided into lots: No

two.1.7) Total value of the procurement (excluding VAT)

Value excluding VAT: £3,138,991

two.2) Description

two.2.2) Additional CPV code(s)

  • 38000000 - Laboratory, optical and precision equipments (excl. glasses)

two.2.3) Place of performance

NUTS codes
  • UKJ - South East (England)
Main site or place of performance

Southampton, Hampshire, United Kingdom

two.2.4) Description of the procurement

The Southampton Nanofabrication Centre is a state-of-the-art facility for microfabrication and high-spec nanofabrication, as well as a wide range of characterisation capabilities, housed in a purpose built, 820m2 cleanroom in the Mountbatten Complex at the University of Southampton. One of the premier cleanrooms in Europe, the Centre has a uniquely broad range of technologies, combining traditional and novel top down fabrication with state-of-the-art bottom up

fabrication. This allows us to develop and produce a wide range of devices in diverse fields such as electronics, nanotechnology and bio nanotechnology and incorporate them into an equally comprehensive array of nano and microsystems for analysis and

use. The characterisation capability is similarly extensive catalogue of microscopes and test gear, from nanometre resolution scanning microscopes to electrical, magnetic and RF analysis. The University is looking to procure a new 200mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service. The user base for the new instrument will be approximately 40 users. The University is conducting this procurement using the open procedure in accordance with the requirements of the Regulations for the purpose of procuring the goods and services described in the Specification.

The University proposes to enter into a Contract for up to sixteen years. This will be the maximum contract period, including any potential extensions with the successful tenderer.

This contract term will comprise:

The initial contract period, comprising;

• A period of twelve months to cover the estimated lead time of the

instrument,

• A two-year warranty period, and

• A four-year comprehensive service agreement

Followed by

• A further nine x twelve-month optional extension periods to the

comprehensive service agreement, subject to the satisfactory

performance and at the discretion of the University. The contract will be effective on signing. The two-year warranty period and four-year service agreement will run from the date of delivery and acceptance of the equipment, estimated to be twelve

months after the commencement of the contract. Extensions, if agreed, shall run from the expiry of the initial service agreement period (year seven), if so agreed by the University. The Contract will run for a maximum of sixteen years up until September 2038 (actual date is TBC following contract award).

The anticipated total value of the proposed solution including all of the extension periods shown above should be within the range of £4m to £5m excluding VAT. It is anticipated that the cost of the instrument itself and core services related to its installation and commissioning will be in the value of £3.14m GBP excluding VAT.

All related components, delivery, installation, commissioning, training, services, and maintenance MUST be included within the proposal. Whilst bidders are expected to provide a proposal that falls within this budget, for the benefit of doubt, the University will not automatically exclude any bidders whose proposal exceeds this

figure. All related components, delivery, installation, commissioning, training, services, and maintenance MUST be included within the proposal.

Details of current expenditure or potential future uptake are given as a guide based on past purchasing and current planning to assist you in the preparation of your Tender. They should not be interpreted as an undertaking to purchase any goods or services to any particular value and do not form part of the Contract.

This procurement is not suitable for splitting into lots. The risk of

dividing the requirement into Lots would render the execution of

the contract excessively technically difficult, not cost effective and

would undermine proper execution of the contract.

two.2.5) Award criteria

Quality criterion - Name: Mandatory Technical Requirement - Instrument / Weighting: 20

Quality criterion - Name: Mandatory Technical Requirement - Customer Support / Weighting: 5

Quality criterion - Name: Mandatory Technical Requirement - Delivery, Training and Logistics / Weighting: 5

Quality criterion - Name: Desirable Technical Requirements / Weighting: 60

Cost criterion - Name: Grand Total / Weighting: 10

two.2.11) Information about options

Options: No


Section four. Procedure

four.1) Description

four.1.1) Type of procedure

Open procedure

four.1.8) Information about the Government Procurement Agreement (GPA)

The procurement is covered by the Government Procurement Agreement: No

four.2) Administrative information

four.2.1) Previous publication concerning this procedure

Notice number: 2022/S 000-023589


Section five. Award of contract

Contract No

2021UoS-0345

Title

Provision of a 200mm High Performance Electron Beam Lithography System

A contract/lot is awarded: Yes

five.2) Award of contract

five.2.1) Date of conclusion of the contract

22 December 2022

five.2.2) Information about tenders

Number of tenders received: 2

Number of tenders received by electronic means: 2

The contract has been awarded to a group of economic operators: No

five.2.3) Name and address of the contractor

JEOL (UK) LTD

JEOL House, Silver Court, Watchmead

Welwyn Garden City

AL7 1LT

Country

United Kingdom

NUTS code
  • UKJ - South East (England)
Companies House

939456

The contractor is an SME

No

five.2.4) Information on value of contract/lot (excluding VAT)

Initial estimated total value of the contract/lot: £3,138,991

Total value of the contract/lot: £3,138,991


Section six. Complementary information

six.4) Procedures for review

six.4.1) Review body

University of Southampton

Southampton

SO17 1BJ

Country

United Kingdom