Section one: Contracting authority
one.1) Name and addresses
University of St Andrews
Walter Bower House, Eden Campus
Guardbridge
KY16 0US
Contact
Adrian Wood
Telephone
+44 1334462523
Country
United Kingdom
NUTS code
UKM72 - Clackmannanshire and Fife
Internet address(es)
Main address
http://www.st-andrews.ac.uk/procurement/
Buyer's address
https://www.publiccontractsscotland.gov.uk/search/Search_AuthProfile.aspx?ID=AA00111
one.2) Information about joint procurement
The contract is awarded by a central purchasing body
one.3) Communication
Access to the procurement documents is restricted. Further information can be obtained at
https://in-tendhost.co.uk/universityofstandrews
Additional information can be obtained from the above-mentioned address
Tenders or requests to participate must be submitted electronically via
https://in-tendhost.co.uk/universityofstandrews
Electronic communication requires the use of tools and devices that are not generally available. Unrestricted and full direct access to these tools and devices is possible, free of charge, at
https://in-tendhost.co.uk/universityofstandrews
one.4) Type of the contracting authority
Body governed by public law
one.5) Main activity
Education
Section two: Object
two.1) Scope of the procurement
two.1.1) Title
School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System
Reference number
PHA/xx0121/AD/SL
two.1.2) Main CPV code
- 22520000 - Dry-etching equipment
two.1.3) Type of contract
Supplies
two.1.4) Short description
The School of Physics & Astronomy is seeking to enhance its research and teaching activity through the acquisition of an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system.
two.1.6) Information about lots
This contract is divided into lots: No
two.2) Description
two.2.2) Additional CPV code(s)
- 42122450 - Vacuum pumps
- 42124300 - Parts of air or vacuum pumps, of air or gas compressors
two.2.3) Place of performance
NUTS codes
- UKM72 - Clackmannanshire and Fife
Main site or place of performance
UK-St Andrews
two.2.4) Description of the procurement
We require an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system for high quality etching (high etch rates, side wall angle control and low sidewall roughness) of
- silicon,
- silicon compounds (e.g. SiC, Si3N4),
- compound III-V & compound II-VI semiconductors (e.g. AlGaInP, InGaP, AlGaAs, InP, GaAs, GaN, etc.),
- dielectrics (e.g. ZnO2, TiO, ITO, Al2O3, ZrO2, etc.),
- metals (e.g. Cr, Al, Ti, Au, W, Pt, etc.) and
- organics (e.g. resists like SU8, S1818, etc and polymers like parylene, PS etc)
containing an inductively coupled plasma (ICP) source for the generation of plasmas with high ion density, low ion energy and narrow energy distribution (ion energy and ion density are separately controllable via an included bias generator).
The ICP-RIE etcher should be fully clean room-compatible. Wafers should be loaded into the etching chamber via a vacuum load lock for process stability, short process cycle times and safety issues. The substrate electrode should be He back-side cooled for dynamic, direct and very efficient temperature control of the substrate in a range of -20 °C to 150 °C, which may require the attachment of an external chiller (to be included in quotation). The etcher should be equipped with a laser interferometer to allow for live detection of the etching progress, and optionally also with an optical emission spectrometer for monitoring of chamber condition. The etcher should be compatible with fluorinated and chlorinated gases. The entire system should be operated from a PC (to be included in delivery).
two.2.5) Award criteria
Price is not the only award criterion and all criteria are stated only in the procurement documents
two.2.7) Duration of the contract, framework agreement or dynamic purchasing system
Duration in months
3
This contract is subject to renewal
No
two.2.10) Information about variants
Variants will be accepted: No
two.2.11) Information about options
Options: No
two.2.13) Information about European Union Funds
The procurement is related to a project and/or programme financed by European Union funds: No
two.2.14) Additional information
All Tenders for the University of St Andrews are administered through our e-Tendering System (InTend). To Express an Interest please go to our tender website at: https://intendhost.co.uk/universityofstandrews
Please note that 'Notes of Interest' placed via PCS (Public Contracts Scotland) are not automatically accepted.
Section three. Legal, economic, financial and technical information
three.1) Conditions for participation
three.1.2) Economic and financial standing
Selection criteria as stated in the procurement documents
three.1.3) Technical and professional ability
Selection criteria as stated in the procurement documents
three.2) Conditions related to the contract
three.2.3) Information about staff responsible for the performance of the contract
Obligation to indicate the names and professional qualifications of the staff assigned to performing the contract
Section four. Procedure
four.1) Description
four.1.1) Type of procedure
Open procedure
four.1.8) Information about the Government Procurement Agreement (GPA)
The procurement is covered by the Government Procurement Agreement: Yes
four.2) Administrative information
four.2.2) Time limit for receipt of tenders or requests to participate
Date
24 February 2021
Local time
12:00pm
four.2.4) Languages in which tenders or requests to participate may be submitted
English
four.2.6) Minimum time frame during which the tenderer must maintain the tender
Duration in months: 3 (from the date stated for receipt of tender)
four.2.7) Conditions for opening of tenders
Date
24 February 2021
Local time
12:00pm
Place
Procurement - University of St Andrews
Information about authorised persons and opening procedure
Appointed Procurement Staff
Section six. Complementary information
six.1) Information about recurrence
This is a recurrent procurement: No
six.2) Information about electronic workflows
Electronic ordering will be used
Electronic invoicing will be accepted
Electronic payment will be used
six.3) Additional information
All tenders for the University of St Andrews are administered through our eTendering System (InTend). To Express an Interest please go to our tender website at: https://intendhost.co.uk/universityofstandrews.
Please note that 'Notes of Interest' placed via PCS (Public Contracts Scotland) are not automatically accepted.
NOTE: To register your interest in this notice and obtain any additional information please visit the Public Contracts Scotland Web Site at https://www.publiccontractsscotland.gov.uk/Search/Search_Switch.aspx?ID=641621.
(SC Ref:641621)
six.4) Procedures for review
six.4.1) Review body
Dundee Sheriff Court
6 West Bell Street
Dundee
DD1 9AD
Telephone
+44 1382229961
Country
United Kingdom
six.4.3) Review procedure
Precise information on deadline(s) for review procedures
The University of St Andrews will incorporate a minimum of 10 calendar day standstill period at the point of information on the award of the contract being communicated to tenderers. This period allows unsuccessful tenderers to seek further debriefing from the contracting authority before the contract is entered into. Applicants have 2 working days from the notification of the award decision to request additional debriefing and that information has to be provided a minimum of 3 working days before the expiry of the standstill period. Such additional information should be requested from The University of St Andrews.
If an appeal regarding the award of contract has not been successfully resolved The Public Contracts (Scotland) Regulations 2012 provide for aggrieved parties who have been harmed or are at risk of harm by a breach of the rule to take action in the Sheriff Court or Court of Session.
The anticipated review body in such cases would be:
Dundee Sheriff Court
6 West Bell Street
Dundee
DD1 9AD
Telephone: +44 1382 229 961
Anyone bringing court proceedings against the University of St Andrews must inform the University of St Andrews in advance of the alleged breach and its intention to bring proceedings. Any such action must be brought within 15 days of the date on which a decision is sent to them or published to challenge that decision.
Proceedings seeking an ineffectiveness order must be brought within 30 days of the publication of the contract award notice in the OJEU, or 30 days from the date of a decision letter to all tenderers concerned, and any candidates concerned, containing a summary of the reason for the recipient being unsuccessful, otherwise 6 months from the date of entering into the contract or concluding the framework agreement.
Where a contract has not been entered into the Court may, by interim order, suspend the procurement procedure. The court may also set aside a decision or actions taken by the University or order it to amend and document; and/or award damages. However, by express requirement the court may decide not to grant an interim order when the negative consequences of such an order are likely to outweigh the benefits, having regard to a number of considerations.
If the contract has been entered into the Court may, depending on the nature of the breach: make an ineffectiveness order; impose a financial penalty; shorten the duration of the contract; make any other order considered appropriate to address the consequences of ineffectiveness or shortening the duration or the contract; award damages.